Depth Profile Analysis of Multilayer Ni-Fe Alloy Coatings by Glow Discharge Optical Emission Spectroscopy (GDOES) and Energy Dispersive X-ray (EDX) Linescan—a Comparative Study

Author(s):  
M. Ives ◽  
D. B. Lewis ◽  
C. Lehmberg
2021 ◽  
Vol 91 (2) ◽  
pp. 352
Author(s):  
А.А. Федоренко ◽  
В.Н. Бержанский ◽  
А.В. Каравайников ◽  
А.Н. Шапошников ◽  
А.Р. Прокопов

Annotation.The paper presents the results of experiments on the application of the method of optical emission spectroscopy of a glow discharge for the profile analysis of vacuum-deposited single and two-layer films of multicomponent garnet ferrites of various compositions before and after crystallization annealing. The presence of internal and external transition layers was revealed, and the modification of their elemental composition during crystallization, as well as the different sequence of synthesis of individual components in ferrite-garnet heterostructures, was investigated.


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